OWC

Specialized for Semiconductor Full-Process Material Handling

The OW series industrial mobile manipulator robots?including OW12, OW8, OWC, and multiple other models?are designed by Youibot for fully automated handling of diverse materials throughout the entire semiconductor manufacturing process. These materials include 12″ and 8″ FOUP PODs, SMIF PODs, Open CSTs, and Magazins. Equipped with a flexible cobot, an end gripper, and vision sensors, the robots accurately grasp materials at upper clamping fixtures, minimizing direct wafer contact and reducing vibration during transfer. The series ensures vibration remains below ?0.5G on flat ground, meeting stringent industry standards. In addition to electronic shelves, the OW robots seamlessly interface with Youibot ATS series (wafer transfer bus) and process equipment to achieve fully automated material pickup and stable transport. They provide an ideal automation solution for end-to-end semiconductor material flow, significantly enhancing operational consistency and efficiency.

Multidirectional Radar Detection Ensures Safety During Operation

TThe OW series integrates a high-performance autonomous mobile chassis with multiple sensors and HMI, offering exceptional flexibility and safety for semiconductor environments. In addition to 360? horizontal LiDAR for navigation and obstacle avoidance, select models feature vertical LiDARs that scan at the height of the load, preventing collisions with obstacles at the same level during movement. This multi-layered sensing approach ensures both personnel safety and material integrity throughout operation.

Flexible Deployment for Quick Start-Up

The OW series is equipped with MOS?an integrated cobot control system developed by YOUIBOT that seamlessly merges the cobot’s upper control with multiple end-effector sensors into one unified operating system. This greatly reduces integration complexity and shortens deployment time across multi-system environments. With streamlined workflows and comprehensive log recording, the OW robots ensure full traceability of operations, providing a reliable and efficient automation foundation for diverse semiconductor applications.

• Planar and vertical safety scanning providing reliability in semiconductor scenario operation;
• Self-developed cobot and end control integration system MOS;
• Storage level monitoring function provided by specially designed electronic material rack;
• HMI interface on the integrated box structure for real-time operator inspection;
• Contribute to Industry 4.0 automation transformation in the semiconductor industry.

The OW series of industrial mobile manipulation robots are custom designed for wafer handling scenarios in the semiconductor industry. Featuring integrated robotic arms, end clamps, and sensors, they provide stable and precise gripping of FOUP PODs, enabling them to be accurately placed on the body storage position. To further reduce the cost of production errors, specially designed electronic shelves equipped with sensors ensure FOUP POD traceability. With the OW series, unnecessary production errors can be avoided, resulting in a more cost-effective and efficient semiconductor manufacturing process.