ATS-20

Specialized for Semiconductor Wafer Box Transfer and Full-Process Logistics

The ATS series lot box transfer robots?including ATS20, ATS12-FFU, and multiple other models?are developed by Youibot to automate semiconductor material transport across the entire manufacturing flow, from wafer fabrication to packaging and testing. Designed for high-throughput circulation of FOUPs, FOSBs, lot boxes, and other carriers, the series ensures efficient, precise, and contamination-free transfer in cleanroom environments. By working in tandem with the OW series mobile manipulators, the ATS robots form the backbone of a fully automated semiconductor factory, delivering seamless pickup, buffering, and distribution for diverse workflows.

High Precision, Low Vibration, and Multi-Level Safety Protection

Powered by laser-SLAM fusion navigation, the ATS series achieves ?10 mm positioning accuracy for stable transport between tools and storage systems. Engineered for semiconductor standards, vibration is controlled at ?0.3G on flat ground to protect sensitive materials during handling. Equipped with dual LiDARs, 3D cameras, pit sensors, 360? bumpers, and emergency stop mechanisms, the robots provide comprehensive environmental perception and safety protection. Advanced RFID-based monitoring ensures real-time tracking of lot box status, while safety light curtains and multi-sensor redundancy safeguard both operators and materials.

Fleet-Wide Coordination and Scalable Deployment

The ATS series is fully compatible with YOUIFLEET?Youibot?s intelligent fleet management system?for large-scale dispatching, multi-robot collaboration, and integration with factory automation software. Featuring long-life batteries and support for both manual and automatic charging, ATS robots ensure uninterrupted operation for high-volume fabs. With scalable configurations and seamless interfacing with OW series manipulators and process equipment, the ATS series enables true end-to-end automation, boosting logistics efficiency and unlocking fully automated semiconductor manufacturing.

• High-precision laser-SLAM navigation ensures ?10 mm positioning accuracy;
• Low-vibration transport ?0.3G protects sensitive semiconductor materials;
• Multi-level safety with dual LiDARs, 3D camera, pit sensors, and 360? bumpers;
• RFID-based storage monitoring enables real-time lot box status tracking;
• Seamless integration with YOUIFLEET for large-scale multi-robot coordination;
• Driving fully automated semiconductor logistics and accelerating Industry 4.0 transformation.

The ATS series of Wafer box transfer robots are built for high-volume and efficient logistics in semiconductor factories. With multi-slot storage and RFID monitoring, they enable batch transfer of FOUPs, FOSBs, and lot boxes with full traceability. Supporting cross-cleanroom operation and ensuring ?0.3G low-vibration transport, the ATS series reduces manual handling risks and enhances overall production efficiency.